High NA diffractive array illuminators and application in a multi-spot scanning microscope
نویسندگان
چکیده
منابع مشابه
Integration of a high-NA light microscope in a scanning electron microscope.
We present an integrated light-electron microscope in which an inverted high-NA objective lens is positioned inside a scanning electron microscope (SEM). The SEM objective lens and the light objective lens have a common axis and focal plane, allowing high-resolution optical microscopy and scanning electron microscopy on the same area of a sample simultaneously. Components for light illumination...
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OVERVIEW This abstract presents the design, performance evaluation and applications of a fast xy translation stage to create area scans of the optical spot in a metrological confocal microscope system. Scanning is achieved by moving the output of the fiber light source over an area of 60 x 60 μm that corresponds to a scan of around 5.2 μm of the spot size. The fiber scanner has a first mode res...
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ژورنال
عنوان ژورنال: Journal of the European Optical Society: Rapid Publications
سال: 2012
ISSN: 1990-2573
DOI: 10.2971/jeos.2012.12026